Room temperature NO2 gas sensor based on stain-etched porous silicon: Towards a low-cost gas sensor integrated on silicon

In this work, we investigate the use of a new low-cost gas sensor based on porous silicon to detect low concentration NO2 at room temperature. focused sensing properties two different types (PS) prepared by simple chemical method namely nano-porous (nano-PS) and macro-porous (macro-PS). The sensors are characterized pores size, thicknesses porosity. Electronic synthesized structures were studied measuring effective minority carrier lifetime using µPCD tester. Structural morphology PS samples also presented Fourier transforms infrared (FTIR) spectroscopy scanning electron microscope (SEM). nano-PS macro-PS performed temperature for gas. Macro-PS exhibit behaviors attributed difference in their morphologies. tested considerable sensitivity (4 ppm) during response time up 45 s.